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Hitachi High-Tech Announces the SU9600: Next-Generation UltrahighResolution Scanning Electron Microscope with High Throughput

Accelerating the expansion of digitalized assets and the deployment of Lumada 3.0 with a focus on the semiconductor field through the launch of a flagship model.

Tokyo, October 31, 2025 — Hitachi High-Tech Corporation ("Hitachi High-Tech"), has launched the Ultrahigh-Resolution Scanning Electron Microscope SU9600, which allows for highly accurate and precise observation of substances down to the sub-nano level. The SU9600 retains the world-leading high resolution. It also incorporates efficient and automated functions to provide improved throughput of data acquisition, thereby helping users with highly precise and highly efficient observation. In response to the growing demand for large-scale data analysis driven by the rise of AI, Hitachi High-Tech supports the research and development of next-generation semiconductors and advanced materials.

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Hitachi High-Tech Announces the SU9600: Next-Generation UltrahighResolution Scanning Electron Microscope with High Throughput